Cleanroom General Info

Training

Each user is responsible for their own glassware. A list of glassware new users should purchase, along with part numbers and approximate costs, can be found here (Excel file): New user shopping list

Things Whut Be Etchin' Other Things

Silicon

• CF4 plasma

• KOH

Germanium

• All fluorinated plasmas

• Piranha (H2SO4+H2O2, any concentration)

• SC1 (NH4OH+H2O2, any concentration)

• Heated H2O2

• KI (Au etchant)