File:UniformityDektakData.xlsx
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UniformityDektakData.xlsx (file size: 287 KB, MIME type: application/vnd.openxmlformats-officedocument.spreadsheetml.sheet)
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Dektak data for BCB planarization study. These were performed using taper masks and show the distances from the BCB to the top of the mesa after ashing back the BCB.
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| Date/Time | Dimensions | User | Comment | |
|---|---|---|---|---|
| current | 15:28, 27 April 2012 | (287 KB) | Jaredhulme (Talk | contribs) | Dektak data for BCB planarization study. These were performed using taper masks and show the distances from the BCB to the top of the mesa after ashing back the BCB. |
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