Initial wafer check

Proposed initial wafer checks

[In brackets the results that should go into the process log are given]

• Microscope check of masks [record irregularities, dirt, etc.]
• Microscope check of wafers [record pits, cracks, etc.]
• AFM on SOI wafer [RMS roughness];
• AFM on III/V wafer [RMS roughness];
• Verify epitaxial layerstack by wet etch and Dektak [Epi layer thicknesses];
• ...

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