Process Hybrid Silica
From OptoelectronicsWiki
| Process ID | Version | Process flow | Process follower | Description |
|---|---|---|---|---|
| ULLW-SOA-1030 | Integration of GaAs actives operating at 1030um with silica waveguides using wafer bonding | |||
| ULLW-SOA-1300 | Integration of actives operating at 1300um with silica waveguides using wafer bonding | |||
| ULLW-SOA-1550 | Integration of actives operating at 1550um with silica waveguides using wafer bonding | |||
| HSP-ULLW-SOA | Integration of ULLWs on the hybrid silicon platform using inverse tapers |
