Difference between revisions of "Cleanroom General Info"
From OptoelectronicsWiki
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== Links == | == Links == | ||
| + | |||
| + | == Things Whut Be Etchin' Other Things == | ||
| + | |||
| + | === Silicon === | ||
| + | * CF4 plasma | ||
| + | |||
| + | * KOH | ||
| + | |||
| + | === Germanium === | ||
| + | * All fluorinated plasmas | ||
| + | |||
| + | * Piranha (H2SO4+H2O2, any concentration) | ||
| + | |||
| + | * SC1 (NH4OH+H2O2, any concentration) | ||
| + | |||
| + | * Heated H2O2 | ||
Revision as of 14:34, 10 May 2011
Contents
Training
Each user is responsible for their own glassware. A list of glassware new users should purchase, along with part numbers and approximate costs, can be found here (Excel file): New user shopping list
Safety
Links
Things Whut Be Etchin' Other Things
Silicon
- CF4 plasma
- KOH
Germanium
- All fluorinated plasmas
- Piranha (H2SO4+H2O2, any concentration)
- SC1 (NH4OH+H2O2, any concentration)
- Heated H2O2
