Difference between revisions of "Cleanroom General Info"
From OptoelectronicsWiki
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== Links == | == Links == | ||
+ | |||
+ | == Things Whut Be Etchin' Other Things == | ||
+ | |||
+ | === Silicon === | ||
+ | * CF4 plasma | ||
+ | |||
+ | * KOH | ||
+ | |||
+ | === Germanium === | ||
+ | * All fluorinated plasmas | ||
+ | |||
+ | * Piranha (H2SO4+H2O2, any concentration) | ||
+ | |||
+ | * SC1 (NH4OH+H2O2, any concentration) | ||
+ | |||
+ | * Heated H2O2 | ||
+ | |||
+ | * KI (Au etchant) |
Latest revision as of 14:35, 10 May 2011
Contents
Training[edit]
Each user is responsible for their own glassware. A list of glassware new users should purchase, along with part numbers and approximate costs, can be found here (Excel file): New user shopping list
Safety[edit]
Links[edit]
Things Whut Be Etchin' Other Things[edit]
Silicon[edit]
- CF4 plasma
- KOH
Germanium[edit]
- All fluorinated plasmas
- Piranha (H2SO4+H2O2, any concentration)
- SC1 (NH4OH+H2O2, any concentration)
- Heated H2O2
- KI (Au etchant)