Difference between revisions of "DUV Stepper development"
From OptoelectronicsWiki
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5) Grating pattern (etching Lag effect) | 5) Grating pattern (etching Lag effect) | ||
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Revision as of 18:17, 22 April 2012
Ideas for test mask.
1) photonic crystal like structures.
2) DC's, star couplers
3) side gratings.
4) resolution markers
5) Grating pattern (etching Lag effect) File:LagGrating.gds
