Difference between revisions of "DUV Stepper development"

Revision as of 17:16, 26 April 2012

Ideas for test mask.

1) Reflector based on photonic crystal or Bragg Grating/Sampled Bragg Grating.

2) DC's, star couplers

3) side gratings.

4) resolution markers

5) Grating pattern (etching Lag effect) File:LagGrating.gds

6) polarization converters/rotators by using off-center longitudinal trenches.

7) Ring, MZI-Ring, two-bus ring, EIT Dual Ring, S-bended Ring.

8) Tapers (polished to check the mode profile), two-level tapers

@@ Line 1: / Line 1: @@
 Ideas for test mask.
-) photonic crystal like structures.
+) Reflector based on photonic crystal or Bragg Grating/Sampled Bragg Grating.
 ) DC's, star couplers
@@ Line 13: / Line 13: @@
 ) polarization converters/rotators by using off-center longitudinal trenches.
+) Ring, MZI-Ring, two-bus ring, EIT Dual Ring, S-bended Ring.
+) Tapers (polished to check the mode profile), two-level tapers