Difference between revisions of "DUV Stepper development"
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Ideas for test mask. | Ideas for test mask. | ||
| − | 1) Reflector based on photonic crystal or Bragg Grating/Sampled Bragg Grating | + | 1) Reflector based on photonic crystal or Bragg Grating/Sampled Bragg Grating -- JKD |
| − | 2) DC's, star couplers | + | 2) DC's, star couplers -- Martijn |
| − | 3) side gratings | + | 3) side gratings -- Michael D |
| − | 4) resolution markers | + | 4) resolution markers -- Sudha |
5) Grating pattern (etching Lag effect) | 5) Grating pattern (etching Lag effect) | ||
| − | [[File:LagGrating.gds]] | + | [[File:LagGrating.gds]] -- Yongbo |
| − | 6) polarization converters/rotators by using off-center longitudinal trenches | + | 6) polarization converters/rotators by using off-center longitudinal trenches -- open |
| − | 7) Ring, MZI-Ring, two-bus ring, EIT Dual Ring, S-bended Ring | + | 7) Ring, MZI-Ring, two-bus ring, EIT Dual Ring(if there is space), S-bended Ring -- Yongbo |
8) Tapers (polished to check the mode profile), two-level tapers | 8) Tapers (polished to check the mode profile), two-level tapers | ||
| + | -- Jock | ||
Revision as of 12:06, 4 May 2012
Ideas for test mask.
1) Reflector based on photonic crystal or Bragg Grating/Sampled Bragg Grating -- JKD
2) DC's, star couplers -- Martijn
3) side gratings -- Michael D
4) resolution markers -- Sudha
5) Grating pattern (etching Lag effect) File:LagGrating.gds -- Yongbo
6) polarization converters/rotators by using off-center longitudinal trenches -- open
7) Ring, MZI-Ring, two-bus ring, EIT Dual Ring(if there is space), S-bended Ring -- Yongbo
8) Tapers (polished to check the mode profile), two-level tapers
-- Jock
