Difference between revisions of "Cleanroom Equipment"
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Revision as of 11:49, 15 August 2012
- List of tools, manuals, links to NanoFab
- Bowers-specific processes
- Remarks, results, optimization runs
Ebeam4
- Very smooth sidewall profile
- Great sidewall coverage if two directional rotation is used
- Tool notes
- Pumping down around 1 hr
- Use group source
- Check Deposit Report for images using two different orientation for deposition
Deep RIE (Bosch Etcher)
Restart instructions:
Note:You may have to wait for the temperature to stabilize between some of these steps.
1) Restart computer
2) Log in info (only required when restarting) Username: 3333, Password: 3333
3) Click the "ON" button (in the bottom left)
4) Utilities->Turbo Pump ON
5) Click "Standby" button (again in bottom left)
6) Service->Maintenance->Pump->System (Turbo Pump)
7) Process->Batch...File->Load...Select a batch file to load, then close window
8) Click "Ready" button (again in bottom left)
9) Windows->Overview Diagram...and...You should be ready to go.
DUV STEPPER
Current - DUV Stepper Waveguides: Media:DUV_Stepper_Waveguides_Development.pptx
DUV Stepper Waveguides Update: Media:DUV Stepper Waveguides_2.pptx
DUV Stepper Waveguides Update: Media:DUV Stepper Waveguides_1.pptx
Additional files for
DUV Lithography Characterization
