Difference between revisions of "DUV Stepper"
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== Characterization == | == Characterization == | ||
[https://docs.google.com/spreadsheet/ccc?key=0Ai_MTssdIAw_dHY4OWRCNjY0V1MzNnFXamhVZWptN3c#gid=0 Process Follower] Google Doc | [https://docs.google.com/spreadsheet/ccc?key=0Ai_MTssdIAw_dHY4OWRCNjY0V1MzNnFXamhVZWptN3c#gid=0 Process Follower] Google Doc | ||
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| + | === Presentations === | ||
| + | Current - DUV Stepper Waveguides: [[Media:DUV_Stepper_Waveguides_Development.pptx]] | ||
| + | |||
| + | DUV Stepper Waveguides Update: [[Media:DUV Stepper Waveguides_2.pptx]] | ||
| + | |||
| + | DUV Stepper Waveguides Update: [[Media:DUV Stepper Waveguides_1.pptx]] | ||
===160C Bake=== | ===160C Bake=== | ||
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| − | + | Return to [[Cleanroom Equipment]] | |
| − | [[Cleanroom Equipment]] | + | |
Revision as of 11:57, 15 August 2012
Characterization
Process Follower Google Doc
Presentations
Current - DUV Stepper Waveguides: Media:DUV_Stepper_Waveguides_Development.pptx
DUV Stepper Waveguides Update: Media:DUV Stepper Waveguides_2.pptx
DUV Stepper Waveguides Update: Media:DUV Stepper Waveguides_1.pptx
160C Bake
SEMs - Dies 26-29: File:160c 8 6 12.zip
Microscope Pics - After 20 min Nanostrip: File:Post 20min NanoStrip 8 10 12.zip
170C Bake
SEMs - Dies 24-27: File:170c 8 4 12.zip
180C Bake
SEMs - Dies 19-28: File:180c 8 4 12.zip
SEMs - Dies 25-29: File:180c 8 6 12.zip
Return to Cleanroom Equipment
