Difference between revisions of "DUV Stepper"

From OptoelectronicsWiki
Jump to: navigation, search
(Characterization)
(Characterization)
Line 5: Line 5:
 
[https://docs.google.com/spreadsheet/ccc?key=0Ai_MTssdIAw_dHY4OWRCNjY0V1MzNnFXamhVZWptN3c#gid=0 Process Follower] Google Doc
 
[https://docs.google.com/spreadsheet/ccc?key=0Ai_MTssdIAw_dHY4OWRCNjY0V1MzNnFXamhVZWptN3c#gid=0 Process Follower] Google Doc
  
=== <u>Presentations ===</u>  <br>
+
=== <u>Presentations</u> === <br>
 
Current - DUV Stepper Waveguides: [[Media:DUV_Stepper_Waveguides_Development.pptx]]
 
Current - DUV Stepper Waveguides: [[Media:DUV_Stepper_Waveguides_Development.pptx]]
  

Revision as of 08:43, 17 August 2012


Characterization

Process Follower Google Doc

=== Presentations ===
Current - DUV Stepper Waveguides: Media:DUV_Stepper_Waveguides_Development.pptx

DUV Stepper Waveguides Update: Media:DUV Stepper Waveguides_2.pptx

DUV Stepper Waveguides Update: Media:DUV Stepper Waveguides_1.pptx

Pictures

160C Bake

SEMs - Dies 26-29: File:160c 8 6 12.zip

Microscope Pics - After 20 min Nanostrip: File:Post 20min NanoStrip 8 10 12.zip

170C Bake

SEMs - Dies 24-27: File:170c 8 4 12.zip

180C Bake

SEMs - Dies 19-28: File:180c 8 4 12.zip

SEMs - Dies 25-29: File:180c 8 6 12.zip


Return to Cleanroom Equipment