Difference between revisions of "DUV Stepper"
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Jaredhulme (Talk | contribs) (→Presentations) |
Jaredhulme (Talk | contribs) (→170C Bake) |
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====170C Bake==== | ====170C Bake==== | ||
| − | DUV Si 170C_0: SEMs - Dies 24-27: [[File:170c_8_4_12.zip]] | + | DUV Si 170C_0: SEMs - Dies 24-27: [[File:170c_8_4_12.zip]] Residue remaining. |
| − | DUV Si 170C_1: SEMs: [[File:DUV-si-170C-1.zip]] | + | DUV Si 170C_1: SEMs: [[File:DUV-si-170C-1.zip]] Excellent clean. |
| − | DUV Si 170C_2: Pic: [[Media:DUV_si_170C_2.jpg]] | + | DUV Si 170C_2: Pic: [[Media:DUV_si_170C_2.jpg]] PR not stripped |
====180C Bake==== | ====180C Bake==== | ||
Revision as of 08:56, 17 August 2012
Contents
Characterization
Process Follower Google Doc
Presentations
Current
DUV Stepper Waveguides: Media:DUV_Stepper_Waveguides_Development.pptx
Backups
DUV Stepper Waveguides Update: Media:DUV Stepper Waveguides_2.pptx DUV Stepper Waveguides Update: Media:DUV Stepper Waveguides_1.pptx
Pictures
160C Bake
SEMs - Dies 26-29: File:160c 8 6 12.zip
Microscope Pics - After 20 min Nanostrip: File:Post 20min NanoStrip 8 10 12.zip
170C Bake
DUV Si 170C_0: SEMs - Dies 24-27: File:170c 8 4 12.zip Residue remaining.
DUV Si 170C_1: SEMs: File:DUV-si-170C-1.zip Excellent clean.
DUV Si 170C_2: Pic: Media:DUV_si_170C_2.jpg PR not stripped
180C Bake
SEMs - Dies 19-28: File:180c 8 4 12.zip
SEMs - Dies 25-29: File:180c 8 6 12.zip
Return to Cleanroom Equipment
