Difference between revisions of "DUV Stepper"
From OptoelectronicsWiki
Jaredhulme (Talk | contribs) (→170C Bake) |
Jaredhulme (Talk | contribs) |
||
| Line 1: | Line 1: | ||
| − | |||
== Characterization == | == Characterization == | ||
| Line 15: | Line 14: | ||
====160C Bake==== | ====160C Bake==== | ||
| − | + | DUV Si 160C_0 SEMs - Gasonics x3 - Dies 26-29: [[File:160c_8_6_12.zip]] | |
| − | SEMs - Dies 26-29: [[File:160c_8_6_12.zip]] | + | DUV Si 160C_0 Microscope Pics - After 20 min Nanostrip: [[File:Post_20min_NanoStrip_8_10_12.zip]] |
| − | + | ||
| − | Microscope Pics - After 20 min Nanostrip: [[File:Post_20min_NanoStrip_8_10_12.zip]] | + | |
====170C Bake==== | ====170C Bake==== | ||
| − | DUV Si 170C_0 | + | DUV Si 170C_0 SEMs - Gasonics x3 - Dies 24-27: [[File:170c_8_4_12.zip]] |
| − | DUV Si 170C_1 | + | DUV Si 170C_1 SEMs - PE2 2' + 1165 30' + u/s 10' + PE2 2': [[File:DUV-si-170C-1.zip]] |
| − | DUV Si 170C_2 | + | DUV Si 170C_2 Pic - Flood DUV pre-etch + AZ300MIF post-etch: [[Media:DUV_si_170C_2.jpg]] |
====180C Bake==== | ====180C Bake==== | ||
| − | + | DUV Si 180C_0: SEMs - Gasonics x3 - Dies 19-28: [[File:180c_8_4_12.zip]] | |
| − | SEMs - Dies 19-28: [[File:180c_8_4_12.zip]] | + | DUV Si 180C_0: SEMs - Gasonics x3 - Dies 25-29: [[File:180c_8_6_12.zip]] |
| − | + | ||
| − | SEMs - Dies 25-29: [[File:180c_8_6_12.zip]] | + | |
Return to [[Cleanroom Equipment]] | Return to [[Cleanroom Equipment]] | ||
Revision as of 09:00, 17 August 2012
Contents
Characterization
Process Follower Google Doc
Presentations
Current
DUV Stepper Waveguides: Media:DUV_Stepper_Waveguides_Development.pptx
Backups
DUV Stepper Waveguides Update: Media:DUV Stepper Waveguides_2.pptx DUV Stepper Waveguides Update: Media:DUV Stepper Waveguides_1.pptx
Pictures
160C Bake
DUV Si 160C_0 SEMs - Gasonics x3 - Dies 26-29: File:160c 8 6 12.zip DUV Si 160C_0 Microscope Pics - After 20 min Nanostrip: File:Post 20min NanoStrip 8 10 12.zip
170C Bake
DUV Si 170C_0 SEMs - Gasonics x3 - Dies 24-27: File:170c 8 4 12.zip DUV Si 170C_1 SEMs - PE2 2' + 1165 30' + u/s 10' + PE2 2': File:DUV-si-170C-1.zip DUV Si 170C_2 Pic - Flood DUV pre-etch + AZ300MIF post-etch: Media:DUV_si_170C_2.jpg
180C Bake
DUV Si 180C_0: SEMs - Gasonics x3 - Dies 19-28: File:180c 8 4 12.zip DUV Si 180C_0: SEMs - Gasonics x3 - Dies 25-29: File:180c 8 6 12.zip
Return to Cleanroom Equipment
