Difference between revisions of "Chips Table"
From OptoelectronicsWiki
(5 intermediate revisions by 2 users not shown) | |||
Line 4: | Line 4: | ||
! Run ID !! wafer !! mask !! process flow !! process follower !! operator !! logbook !! results | ! Run ID !! wafer !! mask !! process flow !! process follower !! operator !! logbook !! results | ||
|- | |- | ||
− | | SOIBuffer2R 1 || || || || || || || [[media:SOIBuffer2RBatch1.pptx | | + | | SOIBuffer2R 1 || || || || || || || [[media:SOIBuffer2RBatch1.pptx | Summary of data.]] |
|- | |- | ||
| SOIBuffer2R 2 || || || || || || || Grass during mesa etch. New batch started. | | SOIBuffer2R 2 || || || || || || || Grass during mesa etch. New batch started. | ||
Line 10: | Line 10: | ||
| SOIBuffer2R 3 || || || || || || || Negative PR residue over III-V couldn't be cleaned off. Process follower adjusted. | | SOIBuffer2R 3 || || || || || || || Negative PR residue over III-V couldn't be cleaned off. Process follower adjusted. | ||
|- | |- | ||
− | | SOIBuffer2R 4 || || || || | + | | SOIBuffer2R 4 || || || || [[media:SOIBuffer2R_v2.6.docx | Process follower]] || || || Testing in progress |
|- | |- | ||
| #1727 W394 || Jared design || Lionix || 80-nm core || || || || | | #1727 W394 || Jared design || Lionix || 80-nm core || || || || | ||
Line 16: | Line 16: | ||
| #1727 W395 || Jared design || Lionix || 80-nm core || || || || | | #1727 W395 || Jared design || Lionix || 80-nm core || || || || | ||
|- | |- | ||
− | + | | Short Loop 2010 06 || || SOIBuffer2R || || [[media:WG.xlsx | Process follower]] || Geza || || Testing in progress | |
+ | |- | ||
Latest revision as of 13:43, 25 June 2010
Run ID | wafer | mask | process flow | process follower | operator | logbook | results |
---|---|---|---|---|---|---|---|
SOIBuffer2R 1 | Summary of data. | ||||||
SOIBuffer2R 2 | Grass during mesa etch. New batch started. | ||||||
SOIBuffer2R 3 | Negative PR residue over III-V couldn't be cleaned off. Process follower adjusted. | ||||||
SOIBuffer2R 4 | Process follower | Testing in progress | |||||
#1727 W394 | Jared design | Lionix | 80-nm core | ||||
#1727 W395 | Jared design | Lionix | 80-nm core | ||||
Short Loop 2010 06 | SOIBuffer2R | Process follower | Geza | Testing in progress |