Difference between revisions of "DUV Stepper development"
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| − | + | ===Planning=== | |
| − | + | * Martijn will compile final mask design; Jock will coordinate full mask plate design; | |
| + | * All designers (see below) send design (detailed geometry) and proposed splits to Martijn before May 17. | ||
| − | + | ===Specs=== | |
| + | Total mask area 26x22mm. | ||
| − | + | PULSAR takes the top 8mm of this mask. | |
| − | 4) resolution markers | + | 2 Layers on 500nm SOI - 250nm Si etch, 500nm Si Etch. |
| + | |||
| + | Each Si layer is approximately 13x14mm. | ||
| + | |||
| + | ===Ideas for test mask=== | ||
| + | |||
| + | 1) Reflector based on photonic crystal or Bragg Grating/Sampled Bragg Grating -- JKD | ||
| + | |||
| + | 2) DC's, star couplers -- Martijn | ||
| + | |||
| + | 3) side gratings -- Michael D | ||
| + | |||
| + | 4) resolution markers -- Sudha | ||
5) Grating pattern (etching Lag effect) | 5) Grating pattern (etching Lag effect) | ||
| − | [[File:LagGrating.gds]] | + | [[File:LagGrating.gds]] -- Yongbo |
| + | |||
| + | 6) polarization converters/rotators by using off-center longitudinal trenches -- open | ||
| + | |||
| + | 7) Ring, MZI-Ring, two-bus ring, EIT Dual Ring(if there is space), S-bended Ring -- Yongbo | ||
| + | |||
| + | 8) Tapers (polished to check the mode profile), two-level tapers -- Jock | ||
Latest revision as of 12:29, 1 June 2012
Planning[edit]
- Martijn will compile final mask design; Jock will coordinate full mask plate design;
- All designers (see below) send design (detailed geometry) and proposed splits to Martijn before May 17.
Specs[edit]
Total mask area 26x22mm.
PULSAR takes the top 8mm of this mask.
2 Layers on 500nm SOI - 250nm Si etch, 500nm Si Etch.
Each Si layer is approximately 13x14mm.
Ideas for test mask[edit]
1) Reflector based on photonic crystal or Bragg Grating/Sampled Bragg Grating -- JKD
2) DC's, star couplers -- Martijn
3) side gratings -- Michael D
4) resolution markers -- Sudha
5) Grating pattern (etching Lag effect) File:LagGrating.gds -- Yongbo
6) polarization converters/rotators by using off-center longitudinal trenches -- open
7) Ring, MZI-Ring, two-bus ring, EIT Dual Ring(if there is space), S-bended Ring -- Yongbo
8) Tapers (polished to check the mode profile), two-level tapers -- Jock
