Difference between revisions of "Wafer bonding"

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Back to [[Process_Hybrid_Silicon]].
 
Back to [[Process_Hybrid_Silicon]].
 
==Current Processes==
 
==Current Processes==
Bonding
 
  
Bonding Defects - [[media:bonding.xlsx|Si WG etch]]
+
Bonding Defects - [[media:Bonding Issues.xlsx|Si WG etch]]
 
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Process flow - [[media:WG.pptx|Si WG etch]]
+
 
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==Suggestions for modified process==
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[[media:Silicon processing.pptx|10282011_HSP]]
+

Revision as of 10:47, 3 November 2011

Back to Process_Hybrid_Silicon.

Current Processes

Bonding Defects - Si WG etch