Difference between revisions of "Cleanroom Equipment"

Revision as of 17:15, 7 August 2012

• List of tools, manuals, links to NanoFab
• Bowers-specific processes
• Remarks, results, optimization runs

Ebeam4

• Very smooth sidewall profile
• Great sidewall coverage if two directional rotation is used
• Tool notes
  • Pumping down around 1 hr
  • Use group source
• Check Deposit Report for images using two different orientation for deposition

Deep RIE (Bosch Etcher)

Restart instructions:

Note:You may have to wait for the temperature to stabilize between some of these steps.

1) Restart computer

2) Log in info (only required when restarting) Username: 3333, Password: 3333

3) Click the "ON" button (in the bottom left)

4) Utilities->Turbo Pump ON

5) Click "Standby" button (again in bottom left)

6) Service->Maintenance->Pump->System (Turbo Pump)

7) Process->Batch...File->Load...Select a batch file to load, then close window

8) Click "Ready" button (again in bottom left)

9) Windows->Overview Diagram...and...You should be ready to go.

DUV STEPPER

Current - DUV Stepper Waveguides: Media:DUV_Stepper_Waveguides_Development.pptx

DUV Stepper Waveguides Update: Media:DUV Stepper Waveguides_2.pptx

DUV Stepper Waveguides Update: Media:DUV Stepper Waveguides_1.pptx

Media:DUV_Lithography_Test_on_Si.rar

160C Bake

SEMs - Dies 21-24: File:SEM Gratings 8 1 12.zip

170C Bake

180C Bake