Difference between revisions of "Cleanroom Equipment"
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== Ebeam4 == | == Ebeam4 == | ||
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== Deep RIE (Bosch Etcher) == | == Deep RIE (Bosch Etcher) == | ||
Revision as of 11:53, 15 August 2012
- List of tools, manuals, links to NanoFab
- Bowers-specific processes
- Remarks, results, optimization runs
Ebeam4
Deep RIE (Bosch Etcher)
DUV STEPPER
Current - DUV Stepper Waveguides: Media:DUV_Stepper_Waveguides_Development.pptx
DUV Stepper Waveguides Update: Media:DUV Stepper Waveguides_2.pptx
DUV Stepper Waveguides Update: Media:DUV Stepper Waveguides_1.pptx
Additional files for
DUV Lithography Characterization
