Difference between revisions of "Masks"

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[[DUV EPhi-1.2 SOI Passives-2 & Pulsar P,N,SL Layers]]
 
[[DUV EPhi-1.2 SOI Passives-2 & Pulsar P,N,SL Layers]]
  
Sid's TLM mask: [[File:Metallization_maskv4.gds]]
+
Sid's TLM mask, single cell: [[File:Metallization_maskv4.gds]].  Plate layout (includes bend loss test, AWG test) [[File:Mask_template.gds]]

Revision as of 10:04, 24 May 2013

Project Masks

Project mask files and associated process followers/flows are on the device run page

Shared /Calibration Masks

DUV Long Grating Library Mask

DUV EPhi-1.2 SOI Passives-2 & Pulsar P,N,SL Layers

Sid's TLM mask, single cell: File:Metallization maskv4.gds. Plate layout (includes bend loss test, AWG test) File:Mask template.gds