Difference between revisions of "Chips Table"

From OptoelectronicsWiki
Jump to: navigation, search
Line 10: Line 10:
 
| SOIBuffer2R 3 ||   ||   ||   ||   ||   ||   || Negative PR residue over III-V couldn't be cleaned off. Process follower adjusted.
 
| SOIBuffer2R 3 ||   ||   ||   ||   ||   ||   || Negative PR residue over III-V couldn't be cleaned off. Process follower adjusted.
 
|-
 
|-
| SOIBuffer2R 4 ||   || [[media:SOIBuffer2R_v2.6.docx | Process follower]] ||   ||   ||   ||   || Testing in progress
+
| SOIBuffer2R 4 ||   ||   || [[media:SOIBuffer2R_v2.6.docx | Process follower]] ||   ||   ||   || Testing in progress
 
|-
 
|-
 
| #1727 W394 || Jared design || Lionix || 80-nm core ||   ||   ||   ||  
 
| #1727 W394 || Jared design || Lionix || 80-nm core ||   ||   ||   ||  

Revision as of 09:34, 9 June 2010

Chip table
Run ID wafer mask process flow process follower operator logbook results
SOIBuffer2R 1             Summary of data.
SOIBuffer2R 2             Grass during mesa etch. New batch started.
SOIBuffer2R 3             Negative PR residue over III-V couldn't be cleaned off. Process follower adjusted.
SOIBuffer2R 4     Process follower       Testing in progress
#1727 W394 Jared design Lionix 80-nm core        
#1727 W395 Jared design Lionix 80-nm core