Difference between revisions of "Process Hybrid Silicon"
From OptoelectronicsWiki
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| SP-VC || || || [[media:VC.xlsx | Si VC etch]] || Vertical channel etch | | SP-VC || || || [[media:VC.xlsx | Si VC etch]] || Vertical channel etch | ||
|- | |- | ||
− | |HSP- | + | |HSP-METCH || || || [[media:Mesa_etch.xlsx | Mesa etch]] || Forms mesa |
|- | |- | ||
− | |HSP- | + | |HSP-QW || || || [[media:QW_etch.xlsx | III-V QW etch]] || Quantum well etch |
− | || | + | |- |
+ | |HSP-NETCH || || || [[media:N_Layer_etch.xlsx | n-layer etch]] || Remove n-layer to expose Si | ||
|- | |- | ||
|HSP-PTLM || || || [[media:P_TLM.xlsx | p-TLM step]] || An additional process step is necessary to pattern p-TLM structures | |HSP-PTLM || || || [[media:P_TLM.xlsx | p-TLM step]] || An additional process step is necessary to pattern p-TLM structures | ||
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|HSP-METAL || || || [[media:P_N_metal.xlsx | thin metal]] || Thin metal deposition | |HSP-METAL || || || [[media:P_N_metal.xlsx | thin metal]] || Thin metal deposition | ||
|- | |- | ||
− | |HSP- | + | |HSP-PP || || || [[media:Probe_pad.xlsx | Probe pad deposition]] |
− | + | ||Pattern and deposit probe metal | |
− | + | ||
|- | |- | ||
| HSP-SOA || || || || Hybrid silicon with SOAs | | HSP-SOA || || || || Hybrid silicon with SOAs |
Revision as of 20:07, 22 September 2010
Process ID | Version | Process flow | Process follower | Description |
---|---|---|---|---|
SP-PWD | Si WG etch | Si WG etch | Single etch-step SOI process; passive components | |
SP-VC | Si VC etch | Vertical channel etch | ||
HSP-METCH | Mesa etch | Forms mesa | ||
HSP-QW | III-V QW etch | Quantum well etch | ||
HSP-NETCH | n-layer etch | Remove n-layer to expose Si | ||
HSP-PTLM | p-TLM step | An additional process step is necessary to pattern p-TLM structures | ||
HSP-METAL | thin metal | Thin metal deposition | ||
HSP-PP | Probe pad deposition | Pattern and deposit probe metal | ||
HSP-SOA | Hybrid silicon with SOAs | |||
HSP-MOD | Hybrid silicon with modulators | |||
HSP-DET | Hybrid silicon with detectors | |||
HSP-SOA-DET | Hybrid silicon with SOAs and detectors | |||
HSP-SOA-DET-MOD | Hybrid silicon with SOAs, detectors and modulators |