Difference between revisions of "DUV Stepper development"
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(Created page with "Ideas for test mask. 1) photonic crystal like structures. 2) DC's, star couplers 3) side gratings. 4) resolution markers") |
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1) photonic crystal like structures. | 1) photonic crystal like structures. | ||
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2) DC's, star couplers | 2) DC's, star couplers | ||
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3) side gratings. | 3) side gratings. | ||
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4) resolution markers | 4) resolution markers | ||
Revision as of 22:55, 20 April 2012
Ideas for test mask.
1) photonic crystal like structures.
2) DC's, star couplers
3) side gratings.
4) resolution markers
