Difference between revisions of "DUV Stepper development"
From OptoelectronicsWiki
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Ideas for test mask. | Ideas for test mask. | ||
− | 1) photonic crystal | + | 1) Reflector based on photonic crystal or Bragg Grating/Sampled Bragg Grating. |
2) DC's, star couplers | 2) DC's, star couplers | ||
Line 13: | Line 13: | ||
6) polarization converters/rotators by using off-center longitudinal trenches. | 6) polarization converters/rotators by using off-center longitudinal trenches. | ||
+ | |||
+ | 7) Ring, MZI-Ring, two-bus ring, EIT Dual Ring, S-bended Ring. | ||
+ | |||
+ | 8) Tapers (polished to check the mode profile), two-level tapers |
Revision as of 17:16, 26 April 2012
Ideas for test mask.
1) Reflector based on photonic crystal or Bragg Grating/Sampled Bragg Grating.
2) DC's, star couplers
3) side gratings.
4) resolution markers
5) Grating pattern (etching Lag effect) File:LagGrating.gds
6) polarization converters/rotators by using off-center longitudinal trenches.
7) Ring, MZI-Ring, two-bus ring, EIT Dual Ring, S-bended Ring.
8) Tapers (polished to check the mode profile), two-level tapers