Difference between revisions of "Mask Order"

Revision as of 17:04, 27 April 2012

UCSB standard stepper frame
- Important! Read the instructions before you start.
- This Ledit file includes frames for 1, 2 and 4 fields on a single plate. You do not need to place each layer in this file, but it will be a good visual display for each layer when you try to put in coordinates for each layer.
Mask vendor: Photronics. Please contact Grace Law (glaw@photronics.com) for mask order.
Specification of the masks.

GDS file for each layer
Instructions for the placement and coordinates for each layer on the mask plate (example)
- You can specify spec. of the mask, position of each layer, and polarity here.
  - A note on polarity: If a layer is specified as "negative," what you have digitized is clear on the mask. If the layer is "positive," what you have digitized would be dark on the mask.
Mask order form (example)

The DUV Stepper alignment mark may be something you put on i-line stepper masks if you plan to do pieces.

TOPPAN is our vendor for DUV Stepper masks. Use this order form

Frame is 22x26mm(X,Y) and you do not rotate the mask. High resolution items should be inside the 21x21

@@ Line 16: / Line 16: @@
 The DUV Stepper alignment mark may be something you put on i-line stepper masks if you plan to do pieces.
-TOPPAN is our vendor for DUV Stepper masks. Use this order form
+TOPPAN is our vendor for DUV Stepper masks. Use this [[media:UCSB_MOF.doc|order form]]
 Frame is 22x26mm(X,Y) and you do not rotate the mask. High resolution items should be inside the 21x21