Difference between revisions of "Cleanroom Equipment"

Revision as of 11:51, 15 August 2012

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 == Deep RIE (Bosch Etcher) ==
-&nbsp;[[Deep_RIE_Bosch_Etcher]] &nbsp;
+&nbsp;[[Deep RIE Bosch Etcher]] &nbsp;
-Restart instructions:
-Note:You may have to wait for the temperature to stabilize between some of these steps.
-) Restart computer
-) Log in info (only required when restarting) Username: 3333, Password: 3333
-) Click the "ON" button (in the bottom left)
-) Utilities->Turbo Pump ON
-) Click "Standby" button (again in bottom left)
-) Service->Maintenance->Pump->System (Turbo Pump)
-) Process->Batch...File->Load...Select a batch file to load, then close window
-) Click "Ready" button (again in bottom left)
-) Windows->Overview Diagram...and...You should be ready to go.
 == DUV STEPPER ==