Difference between revisions of "POEM"
From OptoelectronicsWiki
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= POEM v1.0 = | = POEM v1.0 = | ||
Time: 2012 | Time: 2012 | ||
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+ | == EPI == | ||
+ | |||
+ | SOI: [[SOI_500nm_1000nm_spec.pdf]] | ||
== Process == | == Process == |
Revision as of 09:45, 27 August 2012
EML Array on Silicon substrate with electrical driver flip-bonded
Contents
POEM v1.0
Time: 2012
EPI
SOI: SOI_500nm_1000nm_spec.pdf
Process
Process flow: Media: POEMv1.pptx
Mask
Mask Final: File:POEMv1Final.zip
Libmask code: File:POEMv1Code.zip