Difference between revisions of "Cleanroom Reports"
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(Created page with ''''General Instructions''' *List of etch and deposit rate for cleanroom tools. Each file includes the recipe being used and the calibrated etch rate. *Please update yours if you …') |
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*List of etch and deposit rate for cleanroom tools. Each file includes the recipe being used and the calibrated etch rate. | *List of etch and deposit rate for cleanroom tools. Each file includes the recipe being used and the calibrated etch rate. | ||
*Please update yours if you run any calibration so that everyone can keep track of them. | *Please update yours if you run any calibration so that everyone can keep track of them. | ||
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{| border="3" | {| border="3" | ||
|+ '''Dry Etch''' | |+ '''Dry Etch''' | ||
|- style="background:red; color:white" | |- style="background:red; color:white" | ||
| − | ! Equipment !! Etched material !! Substrate !!Latest etch rate !! Latest update date !! Calib. file !! Note | + | ! Equipment !! Etched material !! Substrate !!Recipe !!Latest etch rate !! Latest update date !! Calib. file !! Note |
|- | |- | ||
| − | | ICP#2 || Si || SOI ||~ 4nm/sec || APR 02, 2010 || [[media:100402_ICP-2_si_etch_calibration.xls | + | | ICP#2 || Si || SOI ||Bowers si etch # 127 ||~ 4nm/sec || APR 02, 2010 || [[media:100402_ICP-2_si_etch_calibration.xls|ICP#2 si etch rate]] || |
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|} | |} | ||
Revision as of 12:06, 2 April 2010
- List of etch and deposit rate for cleanroom tools. Each file includes the recipe being used and the calibrated etch rate.
- Please update yours if you run any calibration so that everyone can keep track of them.
| Equipment | Etched material | Substrate | Recipe | Latest etch rate | Latest update date | Calib. file | Note |
|---|---|---|---|---|---|---|---|
| ICP#2 | Si | SOI | Bowers si etch # 127 | ~ 4nm/sec | APR 02, 2010 | ICP#2 si etch rate |
