Difference between revisions of "Process Hybrid Silicon"
From OptoelectronicsWiki
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| SP-PWD || || [[media:WG.pptx | Si WG etch]] || [[media:WG.xlsx | Si WG etch]] || Single etch-step SOI process; passive components | | SP-PWD || || [[media:WG.pptx | Si WG etch]] || [[media:WG.xlsx | Si WG etch]] || Single etch-step SOI process; passive components | ||
| + | |- | ||
| + | | SP-VC || || || [[media:VC.xlsx | Si VC etch]] || Vertical channel etch | ||
| + | |- | ||
| + | |HSP-QW || || || [[media:QW_etch.xlsx | III-V QW etch]] || | ||
|- | |- | ||
| HSP-SOA || || || || Hybrid silicon with SOAs | | HSP-SOA || || || || Hybrid silicon with SOAs | ||
Revision as of 17:50, 22 September 2010
| Process ID | Version | Process flow | Process follower | Description |
|---|---|---|---|---|
| SP-PWD | Si WG etch | Si WG etch | Single etch-step SOI process; passive components | |
| SP-VC | Si VC etch | Vertical channel etch | ||
| HSP-QW | III-V QW etch | |||
| HSP-SOA | Hybrid silicon with SOAs | |||
| HSP-MOD | Hybrid silicon with modulators | |||
| HSP-DET | Hybrid silicon with detectors | |||
| HSP-SOA-DET | Hybrid silicon with SOAs and detectors | |||
| HSP-SOA-DET-MOD | Hybrid silicon with SOAs, detectors and modulators |
