Modulator

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The objective is to develop high speed, low driving voltage, high extinction ratio modulator based on hybrid silicon platform.

The first generation

Time: 2010


Process

Process flow:

 xls file: Media:EAM10_process.xls‎
 slides: Media:EAM10_process.pptx

Mask files:

 Media: EAM10_Mask.zip

Related Papers

The second generation

Time: 2011

Design

 Epitaxy:
 Structure:

Process

 xls file: Media:EAM11_process.xls‎
 slides: TBU

Report

Related Papers