DUV Stepper development
From OptoelectronicsWiki
Revision as of 20:51, 22 April 2012 by 70.191.95.92 (Talk)
Ideas for test mask.
1) photonic crystal like structures.
2) DC's, star couplers
3) side gratings.
4) resolution markers
5) Grating pattern (etching Lag effect) File:LagGrating.gds
6) polarization converters/rotators by using off-center longitudinal trenches.
