DUV Stepper development

Ideas for test mask.

1) Reflector based on photonic crystal or Bragg Grating/Sampled Bragg Grating.

2) DC's, star couplers

3) side gratings.

4) resolution markers

5) Grating pattern (etching Lag effect) File:LagGrating.gds

6) polarization converters/rotators by using off-center longitudinal trenches.

7) Ring, MZI-Ring, two-bus ring, EIT Dual Ring, S-bended Ring.

8) Tapers (polished to check the mode profile), two-level tapers