Cleanroom Reports
From OptoelectronicsWiki
- List of etch and deposit rate for cleanroom tools. Each file includes the recipe being used and the calibrated etch rate.
- Please update yours if you run any calibration so that everyone can keep track of them.
| Equipment | Etched material | Substrate | Recipe | Latest etch rate | Latest update date | Calib. file | Note |
|---|---|---|---|---|---|---|---|
| ICP#2 | Si | SOI | Bowers si etch # 127 | ~ 4nm/sec | APR 02, 2010 | ICP#2 si etch rate |
