Chips Table
From OptoelectronicsWiki
| Run ID | wafer | mask | process flow | process follower | operator | logbook | results |
|---|---|---|---|---|---|---|---|
| SOIBuffer2R 1 | Summary of data. | ||||||
| SOIBuffer2R 2 | Grass during mesa etch. New batch started. | ||||||
| SOIBuffer2R 3 | Negative PR residue over III-V couldn't be cleaned off. Process follower adjusted. | ||||||
| SOIBuffer2R 4 | Testing in progress | ||||||
| #1727 W394 | Jared design | Lionix | 80-nm core | ||||
| #1727 W395 | Jared design | Lionix | 80-nm core |
