Cleanroom Reports
From OptoelectronicsWiki
- List of etch and deposit rate for cleanroom tools. Each file includes the recipe being used and the calibrated etch rate.
- Please update yours if you run any calibration so that everyone can keep track of them.
| Etched material | Equipment | Substrate | Recipe | Latest etch rate | Latest update date | Latest update by | Calib. file | Note |
|---|---|---|---|---|---|---|---|---|
| Si | ICP#2 | SOI | Bowers si etch # 127 | ~ 3nm/sec | APR 02, 2010 | Hui-Wen | ICP#2 si etch rate |
| Etched material | Solution | Mask | Latest etch rate | Latest update date | Latest update by | Calib. file | Note |
|---|---|---|---|---|---|---|---|
| Thermal oxide | BHF | PR or dielectric | ~100nm/min | ||||
| PECVD oxide | BHF | PR or dielectric | ~225nm/min | ||||
| PECVD SiN | BHF | ~30-50nm/min | Jon P. | ||||
| PECVD SiN | HF | ~500nm/min | Geza | PR does not survive as a mask |
| Material | Equipment | Latest deposit rate | Latest update date | Latest update by | Calib. file | Note |
|---|---|---|---|---|---|---|
| SiN | PECVD | |||||
| SiO2 | PECVD | |||||
| Ta2O5 | Ebeam #2 | 1A/sec | Hui-Wen | AR coating |
