DUV Stepper development
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Revision as of 18:15, 22 April 2012 by 169.231.33.164 (Talk)
Ideas for test mask.
1) photonic crystal like structures.
2) DC's, star couplers
3) side gratings.
4) resolution markers
5) Grating pattern (etching Lag effect) File:LegGrating.gds