DUV Stepper development

Planning

• Martijn will compile final mask design; Jock will coordinate full mask plate design;
• All designers (see below) send design (detailed geometry) and proposed splits to Martijn before May 17.

Ideas for test mask

1) Reflector based on photonic crystal or Bragg Grating/Sampled Bragg Grating -- JKD

2) DC's, star couplers -- Martijn

3) side gratings -- Michael D

4) resolution markers -- Sudha

5) Grating pattern (etching Lag effect) File:LagGrating.gds -- Yongbo

6) polarization converters/rotators by using off-center longitudinal trenches -- open

7) Ring, MZI-Ring, two-bus ring, EIT Dual Ring(if there is space), S-bended Ring -- Yongbo

8) Tapers (polished to check the mode profile), two-level tapers -- Jock