Cleanroom Equipment
From OptoelectronicsWiki
Revision as of 11:51, 15 August 2012 by Jaredhulme (Talk | contribs)
- List of tools, manuals, links to NanoFab
- Bowers-specific processes
- Remarks, results, optimization runs
Ebeam4
- Very smooth sidewall profile
- Great sidewall coverage if two directional rotation is used
- Tool notes
- Pumping down around 1 hr
- Use group source
- Check Deposit Report for images using two different orientation for deposition
Deep RIE (Bosch Etcher)
DUV STEPPER
Current - DUV Stepper Waveguides: Media:DUV_Stepper_Waveguides_Development.pptx
DUV Stepper Waveguides Update: Media:DUV Stepper Waveguides_2.pptx
DUV Stepper Waveguides Update: Media:DUV Stepper Waveguides_1.pptx
Additional files for
DUV Lithography Characterization
