Cleanroom Equipment

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List of tools, manuals, links to NanoFab
Bowers-specific processes
Remarks, results, optimization runs

Deep RIE Bosch Etcher

DUV STEPPER

Current - DUV Stepper Waveguides: Media:DUV_Stepper_Waveguides_Development.pptx

DUV Stepper Waveguides Update: Media:DUV Stepper Waveguides_2.pptx

DUV Stepper Waveguides Update: Media:DUV Stepper Waveguides_1.pptx

Additional files for DUV Lithography Characterization

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