POEM

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EML Array on Silicon substrate with electrical driver flip-bonded

Contents

1 POEM v1.0

POEM v1.0

Time: 2012

EPI

 SOI: File:SOI 500nm 1000nm spec.pdf
 III-V: EAM_EPI_PL1465nm

Process

 Process flow: Media: POEMv1.pptx

Mask

 Mask Final: File:POEMv1Final.zip

 Libmask code: File:POEMv1Code.zip

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