Cleanroom Reports
From OptoelectronicsWiki
General Instructions
- List of etch and deposit rate for cleanroom tools. Each file includes the recipe being used and the calibrated etch rate.
- Please update yours if you run any calibration so that everyone can keep track of them.
| Equipment | Etched material | Substrate | Latest etch rate | Latest update date | Calib. file | Note | |
|---|---|---|---|---|---|---|---|
| ICP#2 | Si | SOI | ~ 4nm/sec | APR 02, 2010 | [[media:100402_ICP-2_si_etch_calibration.xls | ICP#2 si etch rate]] |
