Chips Table
From OptoelectronicsWiki
Revision as of 09:29, 10 June 2010 by 128.111.239.192 (Talk)
Run ID | wafer | mask | process flow | process follower | operator | logbook | results |
---|---|---|---|---|---|---|---|
SOIBuffer2R 1 | Summary of data. | ||||||
SOIBuffer2R 2 | Grass during mesa etch. New batch started. | ||||||
SOIBuffer2R 3 | Negative PR residue over III-V couldn't be cleaned off. Process follower adjusted. | ||||||
SOIBuffer2R 4 | Process follower | Testing in progress | |||||
#1727 W394 | Jared design | Lionix | 80-nm core | ||||
#1727 W395 | Jared design | Lionix | 80-nm core |