Process Hybrid Silicon
From OptoelectronicsWiki
Revision as of 17:50, 22 September 2010 by 128.111.239.104 (Talk)
| Process ID | Version | Process flow | Process follower | Description |
|---|---|---|---|---|
| SP-PWD | Si WG etch | Si WG etch | Single etch-step SOI process; passive components | |
| SP-VC | Si VC etch | Vertical channel etch | ||
| HSP-QW | III-V QW etch | |||
| HSP-SOA | Hybrid silicon with SOAs | |||
| HSP-MOD | Hybrid silicon with modulators | |||
| HSP-DET | Hybrid silicon with detectors | |||
| HSP-SOA-DET | Hybrid silicon with SOAs and detectors | |||
| HSP-SOA-DET-MOD | Hybrid silicon with SOAs, detectors and modulators |
