File:SiO2 Vert.pdf
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SiO2_Vert.pdf (file size: 70 KB, MIME type: application/pdf)
ICP2 etch rate of PECVD SiO2 using recipe 101 SiOxVert (CHF3)
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| Date/Time | Dimensions | User | Comment | |
|---|---|---|---|---|
| current | 15:51, 19 November 2010 | (70 KB) | Molly (Talk | contribs) | ICP2 etch rate of PECVD SiO2 using recipe 101 SiOxVert (CHF3) |
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