PhASER
From OptoelectronicsWiki
PhASER was about making photonic microwave filters on the hybrid silicon platform.
Design
Processing
Generation 1 mask files and media:081220_recipe_optical_filter_batch5.xls can be found here. More information on the mask set can be found on the device run page.
Generation 2 mask files and media:090811_recipe_optical_filter_rev2_batch1.xls can be found here. More information on the mask set can be found on the device run page.
