Difference between revisions of "DUV Stepper"
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[https://docs.google.com/spreadsheet/ccc?key=0Ai_MTssdIAw_dHY4OWRCNjY0V1MzNnFXamhVZWptN3c#gid=0 Process Follower] Google Doc | [https://docs.google.com/spreadsheet/ccc?key=0Ai_MTssdIAw_dHY4OWRCNjY0V1MzNnFXamhVZWptN3c#gid=0 Process Follower] Google Doc | ||
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| + | ===Dry Etch=== | ||
| + | {| border="3" | ||
| + | |- style="background:green; color:white" | ||
| + | ! Etched material !! Equipment !! Substrate !!Recipe !! Latest etch rate !! Latest update date !! Latest update by !! Calib. file !! Note | ||
| + | |- | ||
| + | | Si || ICP#2 ||SOI ||Bowers si etch # 127 ||4nm/s|| JUN 12, 2010 || Jon Peters || [[media:100402_ICP-2_si_etch_calibration.xls|ICP#2 si etch rate]] || 40/20sccm BCl3/Cl2, 500/120W ICP/RF, 2.5Pa | ||
| + | |- | ||
| + | |} | ||
=== Presentations === | === Presentations === | ||
Revision as of 18:26, 5 November 2012
Contents
Characterization
Process Follower Google Doc
Dry Etch
| Etched material | Equipment | Substrate | Recipe | Latest etch rate | Latest update date | Latest update by | Calib. file | Note |
|---|---|---|---|---|---|---|---|---|
| Si | ICP#2 | SOI | Bowers si etch # 127 | 4nm/s | JUN 12, 2010 | Jon Peters | ICP#2 si etch rate | 40/20sccm BCl3/Cl2, 500/120W ICP/RF, 2.5Pa |
Presentations
HP's development for 500 nm WGs, 200 nm coupler gaps (please don't share with people outside Bowers group): Media: 2012_09_11_DUV.pptx
Liftoff process with positive/negative PR (HP's work): Media: 2012_09_28_DUV_Liftoff.pptx
Current Presentation: Media: DUV Stepper Waveguides_v7.pptx
Backup Presentations: DUV Stepper Waveguides Backup Presentations
Pictures
160C Bake
DUV Si 160C_0 SEMs - Gasonics x3 - Dies 26-29: File:160c 8 6 12.zip DUV Si 160C_0 Microscope Pics - After 20 min Nanostrip: File:Post 20min NanoStrip 8 10 12.zip
170C Bake
DUV Si 170C_0 SEMs - Gasonics x3 - Dies 24-27: File:170c 8 4 12.zip DUV Si 170C_1 SEMs - PE2 2' + 1165 30' + u/s 10' + PE2 2': File:DUV-si-170C-1.zip DUV Si 170C_2 Pic - Flood DUV pre-etch + AZ300MIF post-etch: Media:DUV_si_170C_2.jpg DUV Si 170C_1 SEMs - Sidewall profiles post clean: File:9 7 DUV SOI 170 1 Sidewalls.zip DUV SOI 170C_1 SEMs - 1165 30' + u/s 10' + PE2 2': File:8 28 DUV SOI 170C 1.zip DUV SOI 170C_1 SEMs - 1165 30' + u/s 10' + PE2 2': File:8 31 DUV SOI 170C 1.zip DUV SOI 170C_1 SEMs - ZigZag Grating: File:9 11duvzigzaggrating.zip
180C Bake
DUV Si 180C_0: SEMs - Gasonics x3 - Dies 19-28: File:180c 8 4 12.zip DUV Si 180C_0: SEMs - Gasonics x3 - Dies 25-29: File:180c 8 6 12.zip
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