Difference between revisions of "DUV Stepper"
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[https://docs.google.com/spreadsheet/ccc?key=0Ai_MTssdIAw_dHY4OWRCNjY0V1MzNnFXamhVZWptN3c#gid=0 Process Follower] Google Doc | [https://docs.google.com/spreadsheet/ccc?key=0Ai_MTssdIAw_dHY4OWRCNjY0V1MzNnFXamhVZWptN3c#gid=0 Process Follower] Google Doc | ||
| − | === | + | ===PR etch rate=== |
{| border="3" | {| border="3" | ||
|- style="background:green; color:white" | |- style="background:green; color:white" | ||
| − | ! | + | ! PR !! Equipment !! Substrate !!Recipe !! Latest etch rate !! Latest update date !! Latest update by !! Calib. file !! Note |
|- | |- | ||
| − | | | + | | UV210 || ICP#2 ||Si ||SiOxVert||140 nm/s|| Nov 5, 2012 || Geza || - || - |
|- | |- | ||
|} | |} | ||
Revision as of 18:30, 5 November 2012
Contents
Characterization
Process Follower Google Doc
PR etch rate
| PR | Equipment | Substrate | Recipe | Latest etch rate | Latest update date | Latest update by | Calib. file | Note |
|---|---|---|---|---|---|---|---|---|
| UV210 | ICP#2 | Si | SiOxVert | 140 nm/s | Nov 5, 2012 | Geza | - | - |
Presentations
HP's development for 500 nm WGs, 200 nm coupler gaps (please don't share with people outside Bowers group): Media: 2012_09_11_DUV.pptx
Liftoff process with positive/negative PR (HP's work): Media: 2012_09_28_DUV_Liftoff.pptx
Current Presentation: Media: DUV Stepper Waveguides_v7.pptx
Backup Presentations: DUV Stepper Waveguides Backup Presentations
Pictures
160C Bake
DUV Si 160C_0 SEMs - Gasonics x3 - Dies 26-29: File:160c 8 6 12.zip DUV Si 160C_0 Microscope Pics - After 20 min Nanostrip: File:Post 20min NanoStrip 8 10 12.zip
170C Bake
DUV Si 170C_0 SEMs - Gasonics x3 - Dies 24-27: File:170c 8 4 12.zip DUV Si 170C_1 SEMs - PE2 2' + 1165 30' + u/s 10' + PE2 2': File:DUV-si-170C-1.zip DUV Si 170C_2 Pic - Flood DUV pre-etch + AZ300MIF post-etch: Media:DUV_si_170C_2.jpg DUV Si 170C_1 SEMs - Sidewall profiles post clean: File:9 7 DUV SOI 170 1 Sidewalls.zip DUV SOI 170C_1 SEMs - 1165 30' + u/s 10' + PE2 2': File:8 28 DUV SOI 170C 1.zip DUV SOI 170C_1 SEMs - 1165 30' + u/s 10' + PE2 2': File:8 31 DUV SOI 170C 1.zip DUV SOI 170C_1 SEMs - ZigZag Grating: File:9 11duvzigzaggrating.zip
180C Bake
DUV Si 180C_0: SEMs - Gasonics x3 - Dies 19-28: File:180c 8 4 12.zip DUV Si 180C_0: SEMs - Gasonics x3 - Dies 25-29: File:180c 8 6 12.zip
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