Difference between revisions of "Masks"

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(Shared /Calibration Masks)
(Shared /Calibration Masks)
 
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[[DUV EPhi-1.2 SOI Passives-2 & Pulsar P,N,SL Layers]]
 
[[DUV EPhi-1.2 SOI Passives-2 & Pulsar P,N,SL Layers]]
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Sid's TLM mask, single cell: [[File:Metallization_maskv4.gds]].  Plate layout (includes bend loss test, AWG test) [[File:Mask_template.gds]]
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Molly's manual focus/alignment mark only mask (plate layout): [[File:Plate1_noscale.gds]].  Digitized on the file on layer 0 is clear on the mask.

Latest revision as of 13:19, 12 June 2013

Project Masks[edit]

Project mask files and associated process followers/flows are on the device run page

Shared /Calibration Masks[edit]

DUV Long Grating Library Mask

DUV EPhi-1.2 SOI Passives-2 & Pulsar P,N,SL Layers

Sid's TLM mask, single cell: File:Metallization maskv4.gds. Plate layout (includes bend loss test, AWG test) File:Mask template.gds

Molly's manual focus/alignment mark only mask (plate layout): File:Plate1 noscale.gds. Digitized on the file on layer 0 is clear on the mask.