Difference between revisions of "Process Hybrid Silica"
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+ | | ULLW-SOA-1030 || || || || Integration of GaAs actives operating at 1030um with silica waveguides using wafer bonding | ||
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| ULLW-SOA-1300 || || || || Integration of actives operating at 1300um with silica waveguides using wafer bonding | | ULLW-SOA-1300 || || || || Integration of actives operating at 1300um with silica waveguides using wafer bonding |
Latest revision as of 11:48, 18 November 2011
Process ID | Version | Process flow | Process follower | Description |
---|---|---|---|---|
ULLW-SOA-1030 | Integration of GaAs actives operating at 1030um with silica waveguides using wafer bonding | |||
ULLW-SOA-1300 | Integration of actives operating at 1300um with silica waveguides using wafer bonding | |||
ULLW-SOA-1550 | Integration of actives operating at 1550um with silica waveguides using wafer bonding | |||
HSP-ULLW-SOA | Integration of ULLWs on the hybrid silicon platform using inverse tapers |