Difference between revisions of "DUV Stepper"
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=== Pictures === | === Pictures === | ||
| − | + | ====160C Bake==== | |
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DUV Si 160C_0 SEMs - Gasonics x3 - Dies 26-29: [[File:160c_8_6_12.zip]] | DUV Si 160C_0 SEMs - Gasonics x3 - Dies 26-29: [[File:160c_8_6_12.zip]] | ||
DUV Si 160C_0 Microscope Pics - After 20 min Nanostrip: [[File:Post_20min_NanoStrip_8_10_12.zip]] | DUV Si 160C_0 Microscope Pics - After 20 min Nanostrip: [[File:Post_20min_NanoStrip_8_10_12.zip]] | ||
| − | + | ====170C Bake==== | |
DUV Si 170C_0 SEMs - Gasonics x3 - Dies 24-27: [[File:170c_8_4_12.zip]] | DUV Si 170C_0 SEMs - Gasonics x3 - Dies 24-27: [[File:170c_8_4_12.zip]] | ||
DUV Si 170C_1 SEMs - PE2 2' + 1165 30' + u/s 10' + PE2 2': [[File:DUV-si-170C-1.zip]] | DUV Si 170C_1 SEMs - PE2 2' + 1165 30' + u/s 10' + PE2 2': [[File:DUV-si-170C-1.zip]] | ||
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DUV SOI 170C_1 SEMs - 1165 30' + u/s 10' + PE2 2': [[File:8_28_DUV SOI 170C_1.zip]] | DUV SOI 170C_1 SEMs - 1165 30' + u/s 10' + PE2 2': [[File:8_28_DUV SOI 170C_1.zip]] | ||
| − | + | ====180C Bake==== | |
DUV Si 180C_0: SEMs - Gasonics x3 - Dies 19-28: [[File:180c_8_4_12.zip]] | DUV Si 180C_0: SEMs - Gasonics x3 - Dies 19-28: [[File:180c_8_4_12.zip]] | ||
DUV Si 180C_0: SEMs - Gasonics x3 - Dies 25-29: [[File:180c_8_6_12.zip]] | DUV Si 180C_0: SEMs - Gasonics x3 - Dies 25-29: [[File:180c_8_6_12.zip]] | ||
Revision as of 08:56, 29 August 2012
Contents
Characterization
Process Follower Google Doc
Presentations
Current Presentation: Media:DUV Stepper Waveguides_v5.pptx
Backup Presentations: DUV Stepper Waveguides Backup Presentations
Pictures
160C Bake
DUV Si 160C_0 SEMs - Gasonics x3 - Dies 26-29: File:160c 8 6 12.zip DUV Si 160C_0 Microscope Pics - After 20 min Nanostrip: File:Post 20min NanoStrip 8 10 12.zip
170C Bake
DUV Si 170C_0 SEMs - Gasonics x3 - Dies 24-27: File:170c 8 4 12.zip DUV Si 170C_1 SEMs - PE2 2' + 1165 30' + u/s 10' + PE2 2': File:DUV-si-170C-1.zip DUV Si 170C_2 Pic - Flood DUV pre-etch + AZ300MIF post-etch: Media:DUV_si_170C_2.jpg DUV SOI 170C_1 SEMs - 1165 30' + u/s 10' + PE2 2': File:8 28 DUV SOI 170C 1.zip
180C Bake
DUV Si 180C_0: SEMs - Gasonics x3 - Dies 19-28: File:180c 8 4 12.zip DUV Si 180C_0: SEMs - Gasonics x3 - Dies 25-29: File:180c 8 6 12.zip
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